On Fri, 22 Sep 1995, Reza Ghodssi wrote:
>
> Our research group in Wisconsin has extensive experience in using
> polyimides (e.g. Dupont PI-2545 and pyralin PI-2722) for various
> sensors and actuators applications.
>
Can these products be used for high frequency applications, i.e., 200KHz-1MHz?
If so, what thickness of plyimide?

Thank you for your reply.
Yohannes M. Desta

> Also, we often use a layer of thermal oxide (700 A) capped with a
> LPCVD silicon nitride (0.3 micron) as an insulating layer for LIGA
> type electrostatic actuators.  These thicknesses are sufficient enough
> to minimize the capacitative effects for low frequency applications.
>
> However, the thicknesses depend on the perticulars of the requirements.
>
> Let us know if you need some ideas or references.
>
> --Reza
>
>