All-

Have a problem with BPSG deprate. We have tried every logical thing
possible on the tool. As far as dopant don't flow, the films behave
same between the good and bad tool. Also all other films run fine on
the bad tool. Individual incorporation of B2H6 or PH3 or both show
10% deprate differnces between the good tools and the bad. Any
suggestions?

Sathya.