here are my opinions regarding your questions:

-Try Entegris (formerly Fluorware) for your sample holders.  If you hunt around
on their website you will find chemical resistant baskets/cages with lids and
handles for processing pieces of wafers or substrates.

-a pipette works fine for resist dispense

-if you rotate the sample while dispensing resist, the rpm's should be very low

-a more uniform develop is had by agitating the sample

-you can use acetone or a weak Piranha etch to clean your masks (others may have
better suggestions on this one).

- I don't know of any books that give many detailed processing tips.  You can
get a lot of process information from Application Notes (like for the resist you
are using), as well as Labs that post their Standard Operating Procedures
(SOP's) on-line (especially Universities).






natacha smetana  wrote:
Hi all
We have just started to use optical lithography to deposit aluminium structures
either by chemical etching or lift-off.
Since we are new in this business, I have a few basic questions concerning the
art of lithography :
- Up to now, we use tweezers to hold samples in the different liquids
(developer, water, aluminium etchant, acids...). We would prefer to work with
sample holders to let the sample in the liquid without having to old it and to
process several samples in parallel. The problem is we work with small pieces of
wafer of different size (from 7*7mm2 to quaters of 2 inch wafers) and all the
samples holders I can found are designed for a specified size of wafer. Do you
know any manufacturer who sells the kind of sample holder I need? If I have to
manufacture them by myself, could you suggest any material and convenient
design?
- We use 4 inch masks. What is the best way to simply clean them?
- I have a lot of stupid questions concerning lithography (how to put the resist
from the bottle to the sample (syringe, pipette...)? Is it better to put the
resist on the rotating sample? Is it better to develop the sample statiquely or
to stir it?....).
Is there a book or a web site which can answer this kind of very basic and
practical questions ?
Thanks
Natacha


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