Hi Natacha,
a very good book for fundamentals (and more) is:
Fundamentals of Microfabrication
by Marc J. Madou, Marc Madou
BR
Michael
______________________
SUSS MicroTec
Application Center RSC Europe
Michael Jacobs
Applications Engineer
Schleissheimer Strasse 90
85748 Garching
Germany
Fon +49 89 32007 - 363
Fax +49 89 32007 - 390
email [email protected]
-----Ursprüngliche Nachricht-----
Von: natacha smetana [mailto:[email protected]]
Gesendet: Dienstag, 21. September 2004 22:12
An: [email protected]
Betreff: [mems-talk] Lithography for dummy's
Hi all
We have just started to use optical lithography to deposit aluminium
structures either by chemical etching or lift-off.
Since we are new in this business, I have a few basic questions concerning
the art of lithography :
- Up to now, we use tweezers to hold samples in the different liquids
(developer, water, aluminium etchant, acids...). We would prefer to work
with sample holders to let the sample in the liquid without having to old it
and to process several samples in parallel. The problem is we work with
small pieces of wafer of different size (from 7*7mm2 to quaters of 2 inch
wafers) and all the samples holders I can found are designed for a specified
size of wafer. Do you know any manufacturer who sells the kind of sample
holder I need? If I have to manufacture them by myself, could you suggest
any material and convenient design?
- We use 4 inch masks. What is the best way to simply clean them?
- I have a lot of stupid questions concerning lithography (how to put the
resist from the bottle to the sample (syringe, pipette...)? Is it better to
put the resist on the rotating sample? Is it better to develop the sample
statiquely or to stir it?....).
Is there a book or a web site which can answer this kind of very basic and
practical questions ?
Thanks
Natacha
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