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MEMSnet Home: MEMS-Talk: selective etching of copper compared to Si
selective etching of copper compared to Si
2004-09-23
Laetitia Philippe
2004-09-23
Z. Jiang
2004-09-23
Brent Garber (2 parts)
selective etching of copper compared to Si
Laetitia Philippe
2004-09-23
Hi all

do you know a good chemical etching of copper not damaging the silicone
wafer underlying?

Thanks a lot



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