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MEMSnet Home: MEMS-Talk: selective etching of copper compared to Si
selective etching of copper compared to Si
2004-09-23
Laetitia Philippe
2004-09-23
Z. Jiang
2004-09-23
Brent Garber (2 parts)
selective etching of copper compared to Si
Brent Garber
2004-09-23
300 grams of FeCl3 mixed with 1 liter water

Laetitia Philippe wrote:

> Hi all
>
> do you know a good chemical etching of copper not damaging the silicone
> wafer underlying?
>
> Thanks a lot
>
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