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MEMSnet Home: MEMS-Talk: negative photoresist
negative photoresist
2004-09-23
xpeng@EECS.Berkeley.EDU
2004-09-23
Brubaker Chad
negative photoresist
xpeng@EECS.Berkeley.EDU
2004-09-23
Hi,
    I am trying to do liftoff of chrome on top of a copper seed layer using a
negative photoresist. Can someone suggest a neagative photoresist that can be
stripped off with a solution that doesn't damage the copper?
    Thanks.

Jack







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