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News	MEMSnet Home: MEMS-Talk: Wet etching of silicon nitride? Wet etching of silicon nitride? 2004-09-23 Sampo Tuukkanen 2004-09-23 Kirt Williams 2004-09-24 roy lam 2004-09-23 Kasman , Elina Titanium oxide removal 2004-09-24 Balaji Lakshminarayanan 2004-09-24 Phillipe Tabada 2004-09-24 [email protected] Wet etching of silicon nitride? Kasman , Elina 2004-09-23 If you find a solution, let me know. I was looking for wet etch of LPCVD Si3N4 and didn't find anything except for straigt HF. -----Original Message----- From: [email protected] [mailto:[email protected]] On Behalf Of Sampo Tuukkanen Sent: Thursday, September 23, 2004 10:12 AM To: MemsTalk Subject: [mems-talk] Wet etching of silicon nitride? Hi, I would like to wet etch Si3N4 (LPCVD) to prevent the damages of silicon surface during RIE. BHF seems to be quite slow to that. Best regards, Sampo Tuukkanen, NanoScience Center, Jyväskylä. _______________________________________________ [email protected] mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ reply
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