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MEMSnet Home: MEMS-Talk: Titanium oxide removal
Wet etching of silicon nitride?
2004-09-23
Sampo Tuukkanen
2004-09-23
Kirt Williams
2004-09-24
roy lam
2004-09-23
Kasman , Elina
Titanium oxide removal
2004-09-24
Balaji Lakshminarayanan
2004-09-24
Phillipe Tabada
2004-09-24
BobHendu@aol.com
Titanium oxide removal
Balaji Lakshminarayanan
2004-09-24
Hi,

I'd like to know whether it is possible to etch a native oxide that grows on
underlying titanium layer. It is ok if the etchant removes little bit of the
titanium layer.

I have a 1500A of Ti and the native TiO2 needs to be removed. Will a 100:1
BOE remove Ti02?

Regards

Bala



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