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MEMSnet Home: MEMS-Talk: gold film roughness
gold film roughness
2004-09-27
Sachin Rane
gold film roughness
Sachin Rane
2004-09-27
When evaporating gold films (thermal resistive heating or e-beam) on
glass, how does one decrease the roughness of the films? I am using
titanium underlayer while e-beam evaporating and chromium for thermal.
The e-beam made films are better than thermal but not good enough for my
use.
Thanks,SR

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