To All,

I am interested in etching trenches in Lithium Tantalate (~2 micron
deep). Does anyone know the wet etching or dry etching recipe for 36
deg. Y cut X propagating LiTaO3? Thanks in advance.

Yeswanth L Rao
Graduate Research Assistant
Micro/Nano Fabrication Laboratory
Driftmier Engineering Center
University of Georgia
Athens, GA 30602