Hello,

Can anyone name their preferred I-line resist product for doing something on
the order of 4 to 9 microns thickness, printing line/space pairs of 1.5/2.0
microns or better?  I'm looking at AZ9245 as one possibility, and I believe
Shinitsu Micro-Si may be another option but I'm not sure which of their
products to investigate first.

We'll be plating some high-aspect ratio structures to thickness of about 3-5
microns depending on application, similar to the Thin Film Heads industry.

Thanks,
Justin

Justin C. Borski
MEMS Program Manager
Advanced MicroSensors Inc.


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