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MEMSnet Home: MEMS-Talk: pH in CMP Clean
pH in CMP Clean
2004-09-29
Booth, David
2004-09-29
Gary
pH in CMP Clean
Booth, David
2004-09-29
Can anyone suggest a better method of increasing the pH during sapphire
polishing than KOH, using a SiO2 slurry and needing a pH of 10-11?
Thanks very much.

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