Hi Justin,

        You may try AZ P4330 positive resist for your application. I
personally can achieve up to 6.6 micron thick resist with
line-and-space resolution in 1-2 micron consistently. You may contact me
for more information.


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic


On Wed, 29 Sep 2004, Borski, Justin wrote:

> Hello,
>
> Can anyone name their preferred I-line resist product for doing something on
> the order of 4 to 9 microns thickness, printing line/space pairs of 1.5/2.0
> microns or better?  I'm looking at AZ9245 as one possibility, and I believe
> Shinitsu Micro-Si may be another option but I'm not sure which of their
> products to investigate first.
>
> We'll be plating some high-aspect ratio structures to thickness of about 3-5
> microns depending on application, similar to the Thin Film Heads industry.
>
> Thanks,
> Justin
>
> Justin C. Borski
> MEMS Program Manager
> Advanced MicroSensors Inc.
>
>
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