Justin,
You may also want to look into SPR220-4.5, from Rohm and Haas (formerly
Shipley), which should have a coating capability right in the range you are
looking at.
Try to be careful, since the thicker resists tend to bring a few extra
challenges of their own, primary of which is the fact that they have lower
solvent content. Drying during the spin process can cause variations in film
thickness due to rapid change in viscosity. I usually recommend the use of a
coating module that integrates a cover to allow for creation of a solvent rich
atmosphere.
Best Regards,
Chad Brubaker
EV Group invent * innovate * implement
Technology - Tel: 480.727.9635, Fax: 480.727.9700 e-mail:
c.brubaker@EVGroup.com, www.EVGroup.com
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-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Borski, Justin
Sent: Wednesday, September 29, 2004 9:51 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] I-line thick resists?
Hello,
Can anyone name their preferred I-line resist product for doing something on
the order of 4 to 9 microns thickness, printing line/space pairs of 1.5/2.0
microns or better? I'm looking at AZ9245 as one possibility, and I believe
Shinitsu Micro-Si may be another option but I'm not sure which of their
products to investigate first.
We'll be plating some high-aspect ratio structures to thickness of about 3-5
microns depending on application, similar to the Thin Film Heads industry.
Thanks,
Justin
Justin C. Borski
MEMS Program Manager
Advanced MicroSensors Inc.
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