Use Amonia to raise the pH. Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Booth, David [SMTP:[email protected]]
Sent:   Wednesday, September 29, 2004 1:43 PM
To:     [email protected]
Subject:        [mems-talk] pH in CMP Clean

Can anyone suggest a better method of increasing the pH during sapphire
polishing than KOH, using a SiO2 slurry and needing a pH of 10-11?
Thanks very much.
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