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MEMSnet Home: MEMS-Talk: Soda-lime glass etching
Soda-lime glass etching
2004-09-30
[email protected]
2004-09-30
Shile
2004-10-01
[email protected]
2004-10-01
Shile
Soda-lime glass etching
[email protected]
2004-09-30

Hi there,
I have performed in the past SiO2 (grown and deposited on silicon wafers)etching
with all the most used technologies.
Now I am working with Soda-Lime glasses and I need to find a way to etch this
glasses with a slow rate (not more than 1 um per minute) and with a smooth
etched surface.
Any suggestions?

Thanks

reply
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