Hello Laetita,
            First of all thank you very much for your prompt reply.  I am using
Microchem LOR 20 B along with Shipley 1813  . Do
you think it is possible to get 2 um Cu lift off  on 5 um features using LOR 20
B and Sphipley 1813 PR .Please let me know ,
           Thank you very much,
                    Sincerely,
                             Dipankar Ghosh


----- Original Message -----
From: "Laetitia Philippe" 
Date: Tue, 28 Sep 2004 16:42:15 +0200
To: 
Subject: Rép. : [mems-talk] Metal Lift off using LOR 20 B and Shipley 1813

> Hi Dipankar,
>
> which can of solution is this commercial product? what is the
> composition of your feature above the Cu/Cr layer?
>
> Dr Laetitia Philippe
> Electrochemistry and Micro-patterning Group
> EMPA
>
> Feuerwerkstrasse 39
> CH-3602 Thun
>
> Tel 41 (0)332285249
>
> >>> d.ghosh@lycos.com 09/28 5:11 am >>>
> Hi all,
>         I am trying to do a lift off of 2 um Cu / 200 A Cr layer with 5
> um features using a bi layer lift off process using Microchem LOR 20 B
> and Shipley 1813. Does anybody have any experience using this .Could you
> pls share your process details.
>      Also what are the limitations of aspect ratio on bi layer
> photolithography process? Is it possible to do 3 um features of 2 um
> thick metal using this process.
>          Thanks in advance,
>                  Dipankar Ghosh
> --
> _______________________________________________
> Find what you are looking for with the Lycos Yellow Pages
> http://r.lycos.com/r/yp_emailfooter/http://yellowpages.lycos.com/default.asp?S
RC=lycos10
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>

--
_______________________________________________
Find what you are looking for with the Lycos Yellow Pages
http://r.lycos.com/r/yp_emailfooter/http://yellowpages.lycos.com/default.asp?SRC
=lycos10