Try warm hydrogen peroxide. See online papers for etch rate.
    --Kirt Williams
----- Original Message -----
From: "Menn, Steven" 
To: 
Sent: Sunday, October 03, 2004 8:21 PM
Subject: [mems-talk] Tungsten Etch without etching Silicon


> Dear All,
>
> I am looking for a fairly selective process (5: or better) to strip
> patterned Tungsten without etching too much silicon.  Does anyone know
> of any dry/wet etch options?  Thank you.
>
> Steve
>
> -------------------------------------------------
> Steven Menn, Research Assistant
> Boston University Photonics Center
> 8 Saint Mary's Street
> Boston, MA 02215
> email: slavam AT bu.edu
>
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