Jeff, What are you trying to remove from the surface of the alumina, what
kind of surface roughness exists, is the alumina at or near theoretical
density.  Those questions need to be answered to answer yours.  Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Jeff Campbell [SMTP:kjc6@email.byu.edu]
Sent:   Thursday, October 07, 2004 10:59 AM
To:     General MEMS discussion
Subject:        [mems-talk] Cleaning procedure for alumina wafers

Hello,

Does anyone have a good cleaning procedure for cleaning alumina wafers?
For now we are just using a solvent clean.

thanks to all,

Jeff Campbell
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