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MEMSnet Home: MEMS-Talk: (Fischer) Electro-Chemical Polishing
(Fischer) Electro-Chemical Polishing
2004-10-08
Maximiliano Fischer
(Fischer) Electro-Chemical Polishing
Maximiliano Fischer
2004-10-08
Dear experts,

I´m looking for a process to chemically polish a glass or amorphous quartz
surface. After a mechanical blasting to reducing a wafer thickness in only
certain areas, I get of course a rough finish, with microcracks in the order of
5-10 microns deep. The idea is to polish those areas in a way that thickness can
be reduced more at peaks than at valleys... I was told this is done to high-
quality optical lenses. If that is possible, I would like to receive ideas or
hints to look for publications or authors, or even commercial products like
electrochemical etchants. I look forward to getting a response on this.

It´s always a pleasure to share info and ask for it in this forum. Thank you so
much!

Maximiliano Fischer
Grupo MEMS - CNEA
Buenos Aires, Argentina
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