The university of illinois has such facility.  I am not
sure what does low temp PECVD mean? how low a temperature
is required?  (it is typically 250 to 300 C).  If you are
interested, you can email me.

> -----Original Message-----
> From: Michael Gaitan [mailto:gaitan@piper.eeel.nist.gov]
> Sent: Monday, November 16, 1998 5:52 AM
> To: MEMS@ISI.EDU
> Subject: Lab for PECVD deposition
>
>
> Hello:
>
> I am looking for a lab that can deposit low temperature PECVD nitride
> on single chips mounted on wafers.  Any recommendations would be
> greatly appreciated.
>
> Regards,
>
> Michael Gaitan
>
> ---------
>
> Michael Gaitan, Ph.D.
> Project Leader
> MicroElectroMechanical Systems
> NIST
> Gaithersburg MD 20899
>
>