>
>
>
> To MEMS@isi.edu
>
>
> I would like to make Si membrane with thickness of 1-3 micron (if
> possible, submicron) clamped directly on Si wafer. The membrane which I
> want is square, rectangle, or ribbon (both ends clamped) shape with size
> of 1cm X 1cm to 2cm X 2cm. I have a photolithography with
> masks, wet etching, dry plasma etching.
>
>
> Does anyone know about the proceedure or refference papers?
>
>
> Best regards,
>
>
> mori
>
>
>
> ============================================
> Kiyotaka Mori (Graduate Student)
>
> University of Maryland at College Park,
> Tel: 301-405-5229
> Fax: 301-314-9467
> E-mail: mori@eng.umd.edu
> ============================================
>
>
>

How about using a p+ etch stop layer for obtaing the thin si layer?


--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: kmwals01@starbase.spd.louisville.edu