Selective Oxide Etch and other random etch rate
requests
Jim Beall
2004-10-14
On Oct 14, 2004, at 10:39 AM, [email protected] wrote:
> Hi,
> Would you please tell me the etch rate of Si-Nitride in BHF?
A good resource is:
http://mitghmr.spd.louisville.edu/lutz/resources/tables/
Wet_Etch_Table.html
http://mitghmr.spd.louisville.edu/lutz/resources/tables/
Dry_Etch_Table.html
-Jim Beall
303-497-5989
