> Dear colleagues,
>
> I am looking for an equipment for precise nondestructive thickness
> measurement of Si membranes with thicknesses from 1um up to about 20 um. The
> membrane size is larger than 200um. The equipment should allow measurements
> on 6" (and 5") wafers, has a x-y-table for measurements over the wafer and a
> spot size smaller than 200um. I would prefer to measure the real thickness
> of the membrane and not to use a profilometer or change of microscope's
> focus to calculate the membrane thickness from the wafer thickness.
> Information about IR spectrometer with a spot size smaller than 200um or
> another type of measuring system is deeply appreciated.
>
> Dr. Roumiana Paneva
>
>       X-FAB GmbH
>       Haarbergstasse 61
>       D-99097 Erfurt
>       Deutschland
>       Tel: (+49) 361 42 053 21
>       FAX: (+49) 361 42 053 11
>
>
>
>

Filmetrics has a system for about 10K that may work. Check out their web
site.  It uses spectral reflectivity.  We have a system.

http://www.filmetrics.com/

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]