Nichrome (80Ni 20Cr) will also work as a heater.
It has the benefit of good adhesion--no adhesion layer needs to be added.
A rough idea is of sheet resistance is 50 ohms/square at 650 A thickness.

I've also seen a paper in which pure chromium was used.

Tantalum, tantalum nitride, and TaAl alloy (used in some thermal inkjet
heads) are other options.

    --Kirt Williams

----- Original Message -----
From: "Sebastian Sosin" 
To: 
Sent: Friday, October 15, 2004 1:01 AM
Subject: [mems-talk] metallic microhotplate


> I have to make a heater but there is a problem: it must be made of some
metal, not of polysilicon, and the metal shouldn't be Platinum. The max
temperature is 450-500 Celsius.
> What metal can I use?
>
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