MEMS-talk

News	MEMSnet Home: MEMS-Talk: how to spincoat a 50nm thin uniform film of AZ9260? how to spincoat a 50nm thin uniform film of AZ9260? 2004-10-18 Z. Jiang 2004-10-18 Isaac Wing Tak Chan 2004-10-18 Isaac Wing Tak Chan 2004-10-18 Borski, Justin 2004-10-19 Z. Jiang 2004-10-20 narges afshari 2004-10-19 Z. Jiang 2004-10-19 Isaac Wing Tak Chan how to spincoat a 50nm thin uniform film of AZ9260? Z. Jiang 2004-10-19 hi, Thank you very much ineed for you information. But I didn't find any resist-dilution solvent other than the AZEBR. cheers jiang reply
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