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MEMSnet Home: MEMS-Talk: Su-8 to PMMA selective etch
Su-8 to PMMA selective etch
2004-10-20
Lidija Malic
Su-8 to PMMA selective etch
Lidija Malic
2004-10-20
Hi Everyone,
I am trying to make multimode waveguides using spin-coated PMMA as
cladding and SU-8 as core material. I do not have much experience with
SU-8 and I would like to know if there is a selective etchant that will
not attack the PMMA cladding, while etching the unexposed SU-8 layer. Any
recommendation will be of great help.
Thanks,
Lidia


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