A Piranha mask clean will do this just fine.
The Piranha will get quite dirty, so you may want to repeat the cleaning
procedure with fresh Piranha.

It is not so difficult to remove SU-8 as many people think. It is mainly an
matter of having a sufficiently good selectivity to the other materials on the
wafer.

Jacques Jonsmann


________________________________

Fra: [email protected] på vegne af ????
Sendt: fr 22-10-2004 07:03
Til: [email protected]
Emne: [mems-talk] cross linked su8 remover



Hi All,
I'm tryig to make structures of su8 formed directly on a chrome mask.
I want to remove cross linked su8 pattern to reuse the mask.
Dose anyone has any experience of removing cross linked su8 ?
I heard that su8 can be released with the released layer.
But in my case,relase layer mast be UV transmitting material.
What kind of relase layer which dosen't melt by PGMEA can be used?
Dose anyone know other way?
-- Takashi
   University of Keio,Japan

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