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MEMSnet Home: MEMS-Talk: capillary array
capillary array
2004-10-23
Ali Mansouri
2004-10-25
[email protected]
capillary array
[email protected]
2004-10-25
Hallo Ali,
it exists a technique called Macroporus silicon formation that can produce
pores with diameter that goes form <1um till 20 um and more.
The depths that I have reached is half millimiter thorugh wafer (575 um).
This is the only technology (in silicon) I know that goes so deep mantaining an
high aspect ratio.
For 50 mm depths...... I think you are expecting too much. I have never
listened someon speaking of more than 1000 aspect ratio. And in this case you
are asking for 50000.
Bye
Alberto N.



> Hi,
> I am looking for some sources which produce capillary
> array with different pore size (1um-20um) and length (
> 5mm to 50 mm). Thanks, Ali.
>
>
>
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