A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Boron evaporation?
Boron evaporation?
2004-10-25
John Chiaverini
2004-10-26
Jeff Simkins [simkinjr]
2004-10-26
Charles Ellis
Boron evaporation?
John Chiaverini
2004-10-25
Hi, does anybody have any experience with evaporation of boron?  It seems
that it's tough to get to the required ~1800 C with thermal evap.  Is it
usually done with ebeam?  How about PLD?

Any related info. appreciated,
John


John Chiaverini
NIST Boulder, Time and Frequency Division
Ion Storage Group, Quantum Computation Project
[email protected]
(303) 497-4364



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Mentor Graphics Corporation
University Wafer
Tanner EDA by Mentor Graphics