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MEMSnet Home: MEMS-Talk: AZ4620 information
AZ4620 information
2004-10-26
Nibras Sahib Awaja
2004-10-26
Virginia Soares
2004-10-26
Isaac Wing Tak Chan
2004-10-26
rakesh babu
2004-10-26
Brubaker Chad
AZ4620 information
Nibras Sahib Awaja
2004-10-26
Dear all,
I am working with AZ4620 positive photo resist. Could anyone kindly tell me what
are the spin speed, spin time, exposure time and the exposure energy required
for AZ4620. How can I measure the thickness of the AZ4620.
I really appreciate your help.

Thanks,
Nibras



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