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MEMSnet Home: MEMS-Talk: AZ4620 information
AZ4620 information
2004-10-26
Nibras Sahib Awaja
2004-10-26
Virginia Soares
2004-10-26
Isaac Wing Tak Chan
2004-10-26
rakesh babu
2004-10-26
Brubaker Chad
AZ4620 information
Virginia Soares
2004-10-26
Hi Nibras,

If you contact www.clariant.com they will give you the process sheet of the
resist .


Virginia Soares
INESC - Microsistemas e Nanotecnologias
R.Alves Redol,9
1000-029 LISBOA
PORTUGAL
email:vsoares@inesc-mn.pt
Tel: +351 21 3100 300 ext.2504
Fax :+351 21 314 58 43
----- Original Message -----
From: "Nibras Sahib Awaja" 
To: 
Sent: Tuesday, October 26, 2004 2:10 AM
Subject: [mems-talk] AZ4620 information


Dear all,
I am working with AZ4620 positive photo resist. Could anyone kindly tell me
what are the spin speed, spin time, exposure time and the exposure energy
required for AZ4620. How can I measure the thickness of the AZ4620.
I really appreciate your help.

Thanks,
Nibras


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