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MEMSnet Home: MEMS-Talk: Thick Photoresist with high transparency
Thick Photoresist with high transparency
2004-10-27
Carsten Dehoff
2004-10-27
Brubaker Chad
Thick Photoresist with high transparency
Carsten Dehoff
2004-10-27
Hi everybody,

does anyone know/have experience with a negative photo resist (and spin
parameters) for a 7-8 um thick PR film?
My problem is that the resist we are using right now is almost black so I
can hardly see my structures underneath the PR (when aligning).

Thanks!

Carsten

Aachen University


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