Carsten,

One resist that meets your requirements would be AZ N6070, which is a nearly
transparent negative tone photoresist, which uses similar processing chemistry
to the AZP4000 and AZ9000 series (both positive resists).

General spin parameters - 3000 rpm will give ~7-8 µm film thickness. Bake would
be ~2.5 - 3 min at 110C.

Develop in AZ300MIF developer.

Best Regards,
Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel:  480.727.9635, Fax:  480.727.9700  e-mail:
[email protected], www.EVGroup.com

This message and any attachments contain confidential or privileged information,
which is intended for the named addressee(s) only. If you have received it in
error, please notify the sender immediately and then delete this e-mail. Please
note that unauthorized review, copying, disclosing, distributing or otherwise
making use of the information is strictly prohibited.

 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Carsten Dehoff
Sent:   Wednesday, October 27, 2004 7:30 AM
To:     [email protected]
Subject:        [mems-talk] Thick Photoresist with high transparency

Hi everybody,

does anyone know/have experience with a negative photo resist (and spin
parameters) for a 7-8 um thick PR film?
My problem is that the resist we are using right now is almost black so I
can hardly see my structures underneath the PR (when aligning).

Thanks!

Carsten

Aachen University


-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of [email protected]
Sent: Wednesday, October 27, 2004 2:16 AM
To: [email protected]
Subject: MEMS-talk Digest, Vol 24, Issue 34

Send MEMS-talk mailing list submissions to
        [email protected]

To subscribe or unsubscribe via the World Wide Web, visit
        http://mail.mems-exchange.org/mailman/listinfo/mems-talk
or, via email, send a message with subject or body 'help' to
        [email protected]

You can reach the person managing the list at
        [email protected]

When replying, please edit your Subject line so it is more specific than
"Re: Contents of MEMS-talk digest..."

_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/