Hi Karthik

Both sputtering and e-gun evaporation will not work. Sputtering creates
UV-emission, e-gun evaporation emits X-Rays. So your SU-8 is crosslinked
on the surface in both cases.
The only thing that won't affect your SU-8 is: the good old thermal
evaporation.
Make sure to use only low melting materials. Materials with high
meltings (> 1500°) emit thermal radiation during coating and thus can
soften your SU-8 again. Ag, Al or Au are all a good choice.

Good luck,
Roger

applied microSWISS GmbH


>
> Subject:
> [mems-talk] SU- developing problem
> From:
> [email protected]
> Date:
> Tue, 26 Oct 2004 16:58:07 -0700 (PDT)
> To:
> [email protected]
>
>
>hi ,
>I am trying to write a patttern using the e-beam writer on an  SU-8 (
>without developing) . As you might be knowing there is charge up since the
>surface is not conductive. I sputtered some gold of 100A, and then wrote
>my pattern by the e-beam writer, but after finishing that i am unable to
>develop the SU-8 ( the SU-8) doesnt come off. Is it because of the
>sputtering ions exposing off the whole surface and midfying the SU-8
>properties...  can anyone  please suggest me a better method to make the
>substrate conductive ?
>regards
>karthik
>
>