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MEMSnet Home: MEMS-Talk: Etchant and mask for Quartz
Etchant and mask for Quartz
2004-10-29
Ho Yin Chan
Etchant and mask for Quartz
Ho Yin Chan
2004-10-29
Hi all,

 I am not familiar in etching quartz and the corresponding mask layer. I
want to etch a pattern down to a quartz substrate. So, what is the right
etchant for quartz and the corresponding photoresist? Thanks.


Hoyin


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