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MEMSnet Home: MEMS-Talk: Problem of doing lift-off with PMMA and Aluminum Oxide...
Problem of doing lift-off with PMMA and Aluminum Oxide...
2004-11-01
jchuang@bu.edu
Problem of doing lift-off with PMMA and AluminumOxide...
2004-11-02
William Lanford-Crick
Problem of doing lift-off with PMMA and Aluminum Oxide...
jchuang@bu.edu
2004-11-01
Hi All,
I try to pattern my sample on the PMMA950K(500nm) and deposite Al2O3(300nm)
then do the lift-off. But after put in warm acetone for 30MIN, non-thing be
lift-off. Al2O3 is still all over my sample. Do anyone know how to lift-off
the Al2O3? Thanks.

Chien-Chih Huang(Jeff)

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