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MEMSnet Home: MEMS-Talk: Need SOI wafer(s)
Need SOI wafer(s)
2004-11-02
Brendan Kayes
Need SOI wafer(s)
Brendan Kayes
2004-11-02
Hi,

I'm looking for an SOI wafer/wafers with the following specs:



Preferably 3" or 4" diameter wafer, but this is not critical
Crystal orientation <100>



Top/device layer:

p-type Si, doped as highly as possible (i.e. resistivity as low as possible,
preferably <~0.1 ohm.cm)

10 um thick



Buried oxide:

At least 1 um thick



Handle wafer:

Doping level not critical.

~500 um thick.



Please reply to me directly, and not the entire mems-talk list, if you have
any ideas.  I've solicited quotes from a number of vendors, but ideally I'm
looking for stock that's ready to ship now, not in 6-8 weeks.



Thanks,

Brendan.


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