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MEMSnet Home: MEMS-Talk: Implanting Beryllium
Implanting Beryllium
2004-11-02
Brent Garber
2004-11-03
Brent Garber
2004-11-03
Gary
Implanting Beryllium
Brent Garber
2004-11-02
Greetings All,

Does anyone have experience implanting Beryllium using a solid source
with a vaporizer?  I have a Varian DF4 and am trying to get a good beam
current using Beryllium Fluoride and Argon gas.  So far my beam current
starts out strong and then rapidly decreases to nothing.  Any clues are
welcomed.

Thanks!

Brent



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