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MEMSnet Home: MEMS-Talk: Implanting Beryllium
Implanting Beryllium
2004-11-02
Brent Garber
2004-11-03
Brent Garber
2004-11-03
Gary
Implanting Beryllium
Brent Garber
2004-11-03
Greetings All,

Does anyone have experience implanting Beryllium using a vaporizer?  I
have a Varian DF4 implanter and I'm trying to get a good beam current
using Beryllium Fluoride and Argon gas.  So far my beam current starts
out strong and then steadily decreases to nothing.  Any help is
welcomed.

Thanks!

Brent


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