Bruno -

SU-8 starts degrading at around 300 C and begins to decompose as the
temperature approaches 400 C in an oxidizing environment. Even in a
vacuum, it degrades significantly at about 400-450 C. I don't think
there's any chance of it surviving the stated conditions.

Chris

On Thursday, November 4, 2004, at 07:54  am, Bruno Wacogne wrote:

> Dear all,
>
> I have SU8 deposited on pure SI and I would like to oxidise the SI.
> For this, I plane to make the oxidation with the following parameters:
> 1050 °C in wet oxygen. Does anyone know if the SU8 layer will survive
> to this treatment ?
>
> Thank you for your answers,
>
> Bruno
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
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