A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Metal Lift-off
Metal Lift-off
2004-11-08
zhiyanl
2004-11-08
Hong Wu
2004-11-08
Isaac Wing Tak Chan
2004-11-09
kmalladi@uci.edu
2004-11-09
Ryoung-han kim
2004-11-09
Tushar Bansal
2004-11-09
William Lanford-Crick
2004-11-09
Shane Jones
2004-11-09
Jukka.Viheriala@orc.tut.fi
2004-11-09
Bill Moffat
Metal Lift-off
zhiyanl
2004-11-08
Dear friends:

I got a trouble when doing metal lift-off with very small feature size. I
deposited Ti/Au on the patterned PR and then tried to lift off. The feature
size if about 8~10um. But even i soaked it in the acetone for very long time,
the PR still can't be stripped off. It seems the metal not only covered the
top of the PR but also the side wall. I am wondering if you have any idea and
suggestions on how to strip off the PR.

Thank you very much.

Zhiyan


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
MEMStaff Inc.
Nano-Master, Inc.