You need to have overhang on your PR pattern's edges to have metal line
break there. Or else you will never be able to lift off any film.

Hong Wu

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of zhiyanl
Sent: Monday, November 08, 2004 9:10 AM
To: General MEMS discussion
Subject: [mems-talk] Metal Lift-off


Dear friends:

I got a trouble when doing metal lift-off with very small feature size. I
deposited Ti/Au on the patterned PR and then tried to lift off. The feature
size if about 8~10um. But even i soaked it in the acetone for very long
time,
the PR still can't be stripped off. It seems the metal not only covered the
top of the PR but also the side wall. I am wondering if you have any idea
and
suggestions on how to strip off the PR.

Thank you very much.

Zhiyan

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