Dear Colleagues,

Does anybody know an acidic (=isotropic!) etchant for silicon, which
results in a rough etched silicon surface? Best would be deep holes with
high aspect ratios. I heard about some special HNA (HF+HNO3+Acetic Acid)
mixtures. Does anyone know the mixing ratios?

Best regards

Armin Kuebelbeck
MERCK KGaA
64625 Darmstadt
[email protected]