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MEMSnet Home: MEMS-Talk: reg simulation prj
reg simulation prj
2004-11-05
arlene parkers
2004-11-11
Sergio Camacho
reg simulation prj
Sergio Camacho
2004-11-11
Hi Arlene,

I suggest you anyone of these straightforward simulation projects: a
spiezoresistive pressure sensor or a thermal flow velocity sensor.
The pressure sensor consists of a membrane, formed in an epitaxial growth of
polysilicon on a silicon oxide sacrificial layer, the deflection of the
membrane can be measured using polysilicon piezo-resistors forming a
Wheatstone bridge.
The flow velocity sensor uses the thermotransfer principle to determine the
flow velocity.
Both sensors have been widely documented.


Sergio Camacho
Graduate research assistant
MEMS design laboratory
ITESM, Campus Monterrey
Monterrey, NL, México

----- Original Message -----
From: "arlene parkers" 
To: 
Sent: Thursday, November 04, 2004 8:56 PM
Subject: [mems-talk] reg simulation prj


> hi,
>   iam new to this  subject mems and iam doing my masters(first quater) in
> the same focus area. I  have been alloted to do a simulation project .Can
> anyone suggest  on  a simple simulation project  and how to proceed with
> it.
> thanks
> arlene
>
>
> ---------------------------------
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