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MEMSnet Home: MEMS-Talk: Thin film resistive heaters
Thin film resistive heaters
2004-11-14
Govind V. Kaigala
2004-11-14
Wilson, Thomas
Thin film resistive heaters
Govind V. Kaigala
2004-11-14
Hello Everyone,

I am trying to pattern resistive heaters on a glass substrate. Au heaters
have been used with Cr as the adhesion metal layer on glass. However, we
noticed that at high temperature application the resistance of the Au
metal was unstable, resulting in varying temperature.

(1) Has any one tried a similar process and tested these heaters at
approximately 100 degree C. ?

(2) Any suggestions regarding which could be the other metals (and
adhesion layer) that could be used to pattern such heaters which would
have stable characteristics (of resistance) at approximately 100 C.

I would appreciate if anyone could take time off replying to my query.

Thanks.
Govind
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GOVINDKRISHNA V. KAIGALA ("Govind")
Graduate Student
University of Alberta
Dept. of Electrical & Computer Engineering
Tel : 780-492-6432       Fax : 492-1811
Home Page : http://www.ee.ualberta.ca/~govind
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