Pradeep,

William Trimmer edited a book:

Micromechanics and MEMS : Classic and Seminal Papers to 1990
by William S. Trimmer (Editor)

Hope this helps,

Loren St. Clair
FormFactor, Inc.
2140 Research Dr.
Livermore, CA 94550
Phone: 925-243-3556
Fax: 925-456-3900
Cell: 925-525-4796

 -----Original Message-----
From:   mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]  On
Behalf Of Pradeep Dixit
Sent:   Tuesday, November 16, 2004 1:16 AM
To:     MEMS-talk@memsnet.org
Subject:        [mems-talk] Need Classic papers on MEMS

Dear All,

I am looking for a classic technical paper on MEMS.

1. " Anisotropic etching of Silicon" by K.E.Bean, IEEE transaction on
Electron Device, Vol ED-25, pp- 1185-1193, Oct 1978.
2. "Silicon as Mechanical Material" , K. E. Petersen, Proceedings of
IEEE, vol. 70, no. 5, pp. 420-457, May 1982.

The above papers are very famous and i am sure every body must have
seen them. I will be thankful to you if some body forward me these
papers.

Thanks,
Pradeep Dixit
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/