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MEMSnet Home: MEMS-Talk: RE: thermal or optical releasable polymer
RE: thermal or optical releasable polymer
2004-11-17
WALTER Harald
2004-11-17
[email protected]
2004-11-18
Chris Folk
RE: thermal or optical releasable polymer
WALTER Harald
2004-11-17
Dear Gene,

Edward De Meter of Penn-State-University (http://www.psu.edu/) published
a glue which hardens by illumination with UV and gets brittle under IR.
I don't know if the glue is applicable to your wafers.

Harald



> I am looking for polymer that can joint two wafers (Si-to-Si or
> Si-to-glass) temporarily for processing, and then can be separated
> (released) by either thermal or optical (UV) treatment.
> Anyone has the vendor info, please let me know. Thanks!
> Gene
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