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MEMSnet Home: MEMS-Talk: reproducible Parylene depositions
reproducible Parylene depositions
2004-11-17
Michael D Martin
reproducible Parylene depositions
Michael D Martin
2004-11-17
Hi All,
   We are have some difficulty depositing reproducible thicknesses of
parylene C. Under nominally similar conditions (total surface area) our
final parylene thickness has increased by about 75%. Has anyone had
similar problems?

Thanks,
    Mike Martin
    U. of Louisville


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